EDXRF tekniğini kullanarak CuInSe2 ince filminin kalınlık tayini

Abstract

%X oDOÕúPDGD, CuInSe2 LQFH ILOPLQLQ NDOÕQOÕ÷Õ LNL IDUNOÕ yöntem kullanarakbelirlendi. øON/QWHPGH, CuInSe2'nin/R÷XQOX÷XYHNWOHVLELU/R÷XQOXNOoHUYDVÕWDVÕ/ODölçüldü. Daha sonra, birim alan EDúÕQD NWOH KHVDEÕQGDQ CuInSe2LQFHILOPLQLQ NDOÕQOÕ÷ÕEHOLUOHQGL øNLQFL /QWHPGH &X ,Q YH 6H HOHPHQWOHUL LOH &XInSe2 (bulk ve ince film)/DUÕLOHWNHQOHULQLQVR÷XUPDNDWVD/ÕODUÕQÕNXOODQDUDNNDOÕQOÕNEHOLUOHQGL6R÷XUPDNDWVD/ÕODUÕ11,9- NH9 HQHUML DUDOÕ÷ÕQGD EXOXQDQ IDUNOÕ HQHUMLGH LNLQFLO X/DUPD /QWHPLNXOODQÕODUDN OoOG Bu enerjiler, Br, Sr, Mo, Cd, Te ve Ba gibi ikincil kaynaklarNXOODQÕODUDN HOGH HGLOGL øNLQFLO ND/QDNODUÕ X/DUPDN LoLQ NH9¶OLN JDPD ÕúÕQODUÕ/D/ÕQOD/DQ241$P UDG/RDNWLI KDOND ND/QDN NXOODQÕOGÕ øNLQFLO ND/QDNWDQ /D/ÕQODQDQ ;-ÕúÕQODUÕQÕ VD/PDN LoLQ, 5,9 keV'deki rezolüsyonu 0,16 keV olan bir Si(Li) dedektörNXOODQÕOGÕ $/UÕFD /DUÕLOHWNHQ ELOHúLNOHUGH VR÷XUPD NÕ/ÕODUÕQÕQ HWNLQ DWRP QXPDUDODUÕ]HULQGHNL HWNLVL YH IRWRQ HQHUMLVL/OH GH÷LúLPL WDUWÕúÕOGÕ (OGH HGLOHQ GH÷HUOHU WHRULNGH÷HUOHUOHNÕ/DVODQGÕ

In this study, thickness of CuInSe2 thin film was determined using the two differentmethods. In the first method, the density and mass of CuInSe2 was measured by using adensitometer. Then, thickness of CuInSe2 thin film was calculated using the mass per unitarea. In the second method, thickness was determined using the attenuation coefficients ofCu, In and Se elements and CuInSe2 (bulk and thin film) semiconductors. The attenuationcoefficients were measured at 15 different energies from 11.9 to 37.3 keV by usingsecondary excitation method. These energies were obtained using secondary targets such241as Br, Sr, Mo, Cd, Te and Ba. 59.5 keV gamma rays emitted from an annular Amradioactive source were used to excite secondary sources. X-rays emitted of secondarysources were counted by a Si(Li) detector with a resolution of 0.16 keV at 5.9 keV.Additionally, the effect of absorption edges on effective atomic numbers and theirvariation with photon energy in composite semiconductor sample was discussed. Obtainedvalues were compared with theoretical values.