Integration of a bimorph thermal microactuator with electrostatically actuated nano tweezers

dc.contributor.advisor	Alaca, Burhanettin Erdem
dc.contributor.author	Yilmaz, Mehmet
dc.date.accessioned	2020-12-08T08:12:58Z
dc.date.available	2020-12-08T08:12:58Z
dc.date.submitted	2007
dc.date.issued	2018-08-06
dc.identifier.uri	https://acikbilim.yok.gov.tr/handle/20.500.12812/170875
dc.description.abstract
dc.description.abstract		en_US
dc.language	English
dc.language.iso	en
dc.rights	info:eu-repo/semantics/openAccess
dc.rights	Attribution 4.0 United States	tr_TR
dc.rights.uri	https://creativecommons.org/licenses/by/4.0/
dc.subject	Makine Mühendisliği	tr_TR
dc.subject	Mechanical Engineering	en_US
dc.title	Integration of a bimorph thermal microactuator with electrostatically actuated nano tweezers
dc.title.alternative	Isıl tahrik ile çalışan bir mikrosürücünün elektrostatik tahrik ile çalışan nano cımbıza integrasyonu
dc.type	masterThesis
dc.date.updated	2018-08-06
dc.contributor.department	Makine Mühendisliği Anabilim Dalı
dc.identifier.yokid	9009676
dc.publisher.institute	Fen Bilimleri Enstitüsü
dc.publisher.university	KOÇ ÜNİVERSİTESİ
dc.identifier.thesisid	200353
dc.description.pages	103
dc.publisher.discipline	Diğer

Except where otherwise noted, this item's license is described as info:eu-repo/semantics/openAccess