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dc.contributor.advisorBaşdoğan, Çağatay
dc.contributor.authorCebeci, Selman Abdullah
dc.date.accessioned2020-12-08T08:00:04Z
dc.date.available2020-12-08T08:00:04Z
dc.date.submitted2011
dc.date.issued2018-08-06
dc.identifier.urihttps://acikbilim.yok.gov.tr/handle/20.500.12812/169850
dc.description.abstractA Repetitive Controller (RC) is implemented to control the z-axis movements of a piezo-scanner used for AFM scanning and then tested through scan experiments and numerical simulations. The experimental and simulation results show that the RC compensates phase delays better than the standard PI controller at high scan speeds, which leads to less scan error and lower interaction forces between the scanning probe and the surface being scanned. Since the AFM experiments are not perfectly repeatable in the physical world, the optimum phase compensators of the RC resulting this performance are determined through the numerical simulations performed in MATLAB/Simulink. Furthermore, the numerical simulations are also performed to show that the proposed RC is robust and does not require re-tuning of these compensators when the consecutive scan lines are not similar and a change occurs in the probe characteristics.
dc.description.abstractA Repetitive Controller (RC) is implemented to control the z-axis movements of a piezo-scanner used for AFM scanning and then tested through scan experiments and numerical simulations. The experimental and simulation results show that the RC compensates phase delays better than the standard PI controller at high scan speeds, which leads to less scan error and lower interaction forces between the scanning probe and the surface being scanned. Since the AFM experiments are not perfectly repeatable in the physical world, the optimum phase compensators of the RC resulting this performance are determined through the numerical simulations performed in MATLAB/Simulink. Furthermore, the numerical simulations are also performed to show that the proposed RC is robust and does not require re-tuning of these compensators when the consecutive scan lines are not similar and a change occurs in the probe characteristics.en_US
dc.languageEnglish
dc.language.isoen
dc.rightsinfo:eu-repo/semantics/openAccess
dc.rightsAttribution 4.0 United Statestr_TR
dc.rights.urihttps://creativecommons.org/licenses/by/4.0/
dc.subjectMakine Mühendisliğitr_TR
dc.subjectMechanical Engineeringen_US
dc.titleRepetitive control of an XYZ piezo-stage for faster nano-scanning: Numerical simulations and experiments
dc.title.alternativeNano düzeyde daha hızlı tarama için XYZ hareketli piezo tarayıcının tekrarlı kontrolü: Benzetim ve deney
dc.typemasterThesis
dc.date.updated2018-08-06
dc.contributor.departmentMakine Mühendisliği Anabilim Dalı
dc.subject.ytmControl systems
dc.subject.ytmNanotechnology
dc.subject.ytmAtomic force microscope
dc.identifier.yokid402615
dc.publisher.instituteFen Bilimleri Enstitüsü
dc.publisher.universityKOÇ ÜNİVERSİTESİ
dc.identifier.thesisid285333
dc.description.pages53
dc.publisher.disciplineDiğer


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